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Semiconductor Parameter Analyzer
HP4145B with Labview

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Semiconductor Parameter Analyzer Keithley 4200SCS

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LCR meter

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Probe Station

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Tube furnace 

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Tube furnace (CVD)

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Glovebox system

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Thermal evaporator

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Optical microscopy

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Freeze dryer

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Clean bench

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Desiccator / DI water 

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Bar coator

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Micro balance

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Ultrasonicator

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Hydrothermal reactor

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Fume hood 1

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Spin coator

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4-point probe measurement

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Glovebox system

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Oven

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Fume hood 2

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UV ozone tretment

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Sputtering system

Planed

Maskless lithography